August Technology expands wafer inspection applications to include MEMS and photonics markets

March 13, 2001–Bloomington, Minnesota–August Technology Corp. today announced that it has received orders for NSX Series inspection systems from two new U.S.-based customers with applications in the emerging markets of microelectromechanical systems (MEMS) and photonics.

“The NSX Series has proven to be a valuable inspection solution for these emerging segments of the microelectronics industry,” says Mayson Brooks, August Technology’s vice president of sales and marketing. “These newly developed photonics and MEMS devices are fabricated on wafers in a process similar to semiconductors, making the NSX an ideal solution for detecting defects and providing information for process enhancement for these customers.”

MEMS, also referred to as micro-machines, combine electrical circuitry and mechanical systems to perform specific functions and include devices such as optical switches used in networking applications, air bag sensors, and pressure sensors. Photonics devices are used to guide, detect, and control light sources in communications networking.

In the past several months the company also has announced sales to the optoelectronics, micro display, data storage, and print head markets.

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