Robotic handler hits reliability milestone

March 22, 2001 — Horsham, Pennsylvania — The robotic handler of Solid State Equipment Corp (SSEC) Trilennium processor has passed 100,000 unattended cycles of in factor life-testing. No interruptions or failures were recorded. The robot is able to move wafers through processing steps, and from input cassette or FOUP to output. According to SSEC, two- and three-blade handlers optimize workflow and isolate handling of in-process from finished wafers.

SSEC says that their wet processors and Trilennium cleaners are available for wafers up to 300mm. In addition, they are available for applications that include coating, developing, cleaning, etching and solvent processing. According to SSEC, single- or multiple-station configurations can be designed for parallel operation, high throughput manufacturing and multi-step processing


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