April 23, 2001 – San Jose,CA – Numerical Technologies Inc. and Intel Corp. have signed multi-year, multi-million-dollar technology cross-licensing agreement for advanced photolithography solutions used in the production of high-end semiconductors.
The agreement gives Intel the rights to use Numerical’s patented
phase-shifting technology and software for the production of advanced integrated circuits (ICs). In addition, Numerical gains access to Intel’s patents related to advanced lithography, including phase-shift mask technology.
Numerical’s production-proven phase-shifting technology enables
semiconductor manufacturers to reliably and cost-effectively fabricate subwavelength ICs using available optical lithography equipment, according to the company. Numerical’s phase-shifting technology is the only commercially available strong phase-shifting technology that is currently used in IC production, the firm went on to state. It has been used to fabricate transistors as small as 25nm.