Numerical, Intel sign phase-shifting tech agreement

April 23, 2001 – San Jose,CA – Numerical Technologies Inc. and Intel Corp. have signed multi-year, multi-million-dollar technology cross-licensing agreement for advanced photolithography solutions used in the production of high-end semiconductors.

The agreement gives Intel the rights to use Numerical’s patented

phase-shifting technology and software for the production of advanced integrated circuits (ICs). In addition, Numerical gains access to Intel’s patents related to advanced lithography, including phase-shift mask technology.

Numerical’s production-proven phase-shifting technology enables

semiconductor manufacturers to reliably and cost-effectively fabricate subwavelength ICs using available optical lithography equipment, according to the company. Numerical’s phase-shifting technology is the only commercially available strong phase-shifting technology that is currently used in IC production, the firm went on to state. It has been used to fabricate transistors as small as 25nm.


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