Entegris Joins Center for Microcontamination Control

May 29, 2001 — CHASKA, MN — Materials integrity management company Entegris Inc. has joined the Center for Microcontamination Control at the University of Arizona, a National Science Foundation university/industry consortia.

“Membership in the Center for Microcontamination Control, the only NSF consortia devoted to contamination control within the semiconductor industry, extends our ability to be on the leading edge of research in the microcontamination area,” said John Goodman, executive vice president and CTO of Entegris. “This area is of great importance to protecting the integrity of critical materials during handling, transportation and storage and thus a natural fit for Entegris.”

The membership allows Entegris to expand its research capabilities through academic research and development and expands it ties with other companies in the microelectronics industry.

The Center for Microcontamination Control was founded in 1984. Current members include IC manufacturers, equipment and component suppliers. Some of the projects now being funded involve thin oxides, electronegative plasma, microbiocontamination in ultrapure water, BEOL, yield modeling, CMP and post-CMP cleaning.

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