Semitool files suit

June 12, 2001 – Kalispell, MT – Semitool has filed suits against Applied Materials is the US District Court for the Northern District of CA, and against Novellus Systems, Ebara Corp., and Ebara Technologies, in the US District Court for Oregon.

According to Semitool, the suits allege infringement of Semitool’s US patent 6,197,181 (Chen) “Apparatus and Method for Electrolytically Depositing a Metal on a Microelectronic Workpiece.”

The suits seek injunctive relief, and damages for past infringement and increased damages for willful infringement, according to Semitool.


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