 |
Modular cleanroom plenum
The design includes a rectangular plenum body with an air barrier that forms a top surface and a ceiling grid that forms a bottom surface of the modular cleanroom plenum. The plenums are attached to the primary support structure of a cleanroom building in whatever number and configuration is required by the layout. According to the inventors, providing the air barrier layer, ceiling grid, framework between the two layers, fire sprinkler system, air transfer ducts, balancing dampers and all of the normal components of the ceiling grid in one modular component significantly decreases the cost and time required for construction.
Patent number: 6,132,309
Date granted: October 17, 2000
Inventors: Paul Giulo Panelli, David Emmett Benson
and Howard Lyle Gile, Newark, CA
 |
Acceleration and analysis architecture for ion implanter
An ion beam generator includes an ion beam source for generating an ion beam, an acceleration/deceleration column for selectably accelerating or decelerating ions to desired energies, a source filter positioned between the ion beam source and the acceleration/deceleration column for removing first undesired species from the ion beam, and a mass analyzer positioned downstream of the acceleration/deceleration column for removing second undesired species from the ion beam. The ion beam generator supplied an energetic ion beam having a low level of energy and mass contaminants. The ion beam generator may be utilized in an ion implanter.
Patent number: 6,130,436
Date granted: October 10, 2000
Inventors: Anthony Renau and Charles McKenna, Varian Semiconductor Equipment Associates Inc. (Gloucester, MA)
 |
Microbiological water filtering
The invention comprises a method and device for filtrating and/or purifying fluids such as water or other solutions that contain microbiological contaminants. This includes fluids containing bacteria and/or viruses where the fluid is passed through a purification material composed of apatite and absorption media in a fixed binder matrix.
Patent number: 6,180,016
Date granted: January 30, 2001
Inventors: Arthur W. Johnston, Arthur F. Johnston,
Frank A. Williams and Kenneth D. Hughes,
Watervisions International Inc. (Atlanta, GA)
Send your inventions
Information on the patents highlighted was obtained through the U.S. Patent and Trademark Office. Inventors who have been granted patents within the last six months for new cleanroom and contamination technology are encouraged to submit them to CleanRooms magazine for publication. Send a brief description of the invention along with a detailed drawing to Mark A. DeSorbo, associate editor, CleanRooms, 98 Spit Brook Road, Nashua, NH 03062, or e-mail at [email protected].