Asyst and TSMC team 300mm automation solution

September 11, 2001 – Fremont, CA – Asyst Technologies Inc. is collaborating with Taiwan Semiconductor Manufacturing Co. (TSMC) on a strategic 300mm fab-transport development project.

Under the agreement, Asyst, provider of Standard Mechanical Interface (SMIF)-based manufacturing automation systems, will team with TSMC to expand the capabilities of Asyst’s FasTrack automated material handling system (AMHS). The companies’ shared goal is to optimize the product for TSMC’s cutting-edge 300mm manufacturing vision.

The four-month project timetable includes key milestones aimed at allowing TSMC to fully optimize Asyst’s vehicle-less, continuous-flow transport (CFT) system to meet TSMC’s 300mm automation objectives: increased capacity, reduced lot-delivery time and maximized tool utilization. The project calls for Asyst to provide TSMC with a FasTrack transport system, which will be installed initially at Asyst’s facility in Taichung, Taiwan, to facilitate the joint development work.

Extensive performance testing will be conducted to integrate the FasTrack system’s ability to significantly increase tool utilization and fab throughput. Like product yield enhancement, proven via Asyst’s SMIF technology, these factors represent the next principal “levers” in fab productivity and profitability.

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