Brooks Automation signs multi million dollar agreement with ProMOS

September 18, 2001 – Chelmsford, MA – Brooks Automation Inc., a supplier of tool and factory hardware and software automation solutions for the global semiconductor industry, has received a multi million-dollar order from ProMOS Technologies for its SEARAMS product and installation services. ProMOS will deploy SEARAMS in both its 200mm and 300mm factories. Installation services will begin immediately.

SEARAMS will enable ProMOS to connect and monitor status and performance of all key tools in the fab. ProMOS chose SEARAMS because Brooks was able to demonstrate actual improvement in tool productivity, according to ProMOS.

SEARAMS will provide ProMOS with the utilization of each tool over time. Utilization reports include graphical representations of both the productive and non-productive time with indications for the reasons for each period of non-productivity. Fab engineers can analyze the data and, based on their analysis, take specific actions to improve overall fab productivity.


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