Rudolph Technologies and Therma-Wave reach settlement

September 28, 2001 – Flanders, NJ – Rudolph Technologies and Therma-Wave, Inc., today announced that they have reached a settlement in their Patent Interference proceeding.

As a condition of the settlement, Therma-Wave filed a concession of priority in the Interference based upon a review of the evidence presented by Rudolph. In exchange Rudolph has agreed not to assert its patent against Therma-Wave’s products. No financial consideration was paid by either party. Other terms of the settlement were not disclosed.

We are pleased to finally get this issue resolved and behind us,” commented Paul F. McLaughlin, Chairman and CEO of Rudolph Technologies. “We can now focus additional resources on the more important issues at hand. Specifically, continuing our developments of advanced metrology systems during this portion of the economic cycle so that Rudolph is a required technology purchase for the pending industry upturn.”

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