October 9, 2001 – Chelmsford, MA – Brooks Automation Inc. has completed the acquisition of General Precision Inc. (GPI), a supplier of environmental solutions for the semiconductor industry.

GPI’s capability and focus will enable Brooks to emerge as a major supplier in the OEM mini-environment market, according to the companies. The acquisition will also expand the company’s scope of supply for key OEM customers and strengthen its presence in the atmospheric process equipment segment.

The transaction will be accounted for as a purchase of assets in exchange for 850,000 shares of Brooks’ common stock, subject to adjustment in certain cases.

“This is a great acquisition for our company,” said Robert Therrien, president and CEO of Brooks. “As transistor geometrics get smaller and film thickness gets thinner, particle and molecular contamination control at the point of use will be increasingly more important in achieving high device yields. We are fortunate in acquiring a company in this specialized technology. This will extend our reach into the growing market segment of tool automation – the interface to the factory and the environmental control systems for critical processes.”