Ashland Beefs Up Ability to Evaluate Stripper Performance

November 26, 2001 — DUBLIN, OH — Ashland Specialty Chemical Company’s Electronic Chemicals Division has added a Hitachi Focused Ion Beam (FIB) System that the company says will allow it to better assess stripper performance and better serve customers in the production process.

With the FIB, Ashland will have more precise preparation of semiconductor cross-section specimens for electron microscopy and analysis. The system provides imaging of the milling area of the specimen with a resolution of 10 nanometers.

“With this technology we further improve our abilities to troubleshoot stripper performance issues and provide the cleaning performance and corrosion inhibition our customers depend on from Ashland,” said Sue Zachman, business manager of Ashland-ACT.

The company said the new system will be particularly helpful in the analysis of Damascene structures, which use soft copper and fragile low-k films.

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