Therma-Wave completes acquisition of Sensys Instruments Corp.

Jan. 17, 2002 – Fremont, CA – Therma-Wave Inc., a worldwide developer and manufacturer of process control metrology systems, has completed its acquisition of Sensys Instruments Corp.

Under the terms of the agreement, Therma-Wave. will exchange 4,470,514 shares of common stock for shares of Sensys Instruments, plus assume Sensys warrants for an additional 329,486 Therma-Wave shares.

There was no cash paid as consideration in the acquisition. As a result of the acquisition Sensys has become a wholly owned subsidiary of Therma-Wave, focusing primarily on the emerging market for integrated metrology.

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