MKS signs agreement to acquire Tenta Technology

March 8, 2002 – Andover, MA – MKS Instruments Inc. a supplier of instruments, components, and subsystems used to measure, control, power, and analyze semiconductor and other advanced thin-film manufacturing processes, has entered into a definitive agreement to acquire Tenta Technology Ltd. for a combination of cash and stock.

Tenta, with approximately 40 employees in Tel Aviv, Israel, and Sunnyvale, CA, is a supplier of modular, computer-based process control systems used to control semiconductor manufacturing equipment.

The acquisition supports MKS’ strategy to integrate technologies surrounding the semiconductor equipment process chamber, and enhances MKS’ position in distributed computer-based process control and data management.

The transaction, which is subject to certain closing conditions, is expected to be completed in the 1Q02 and is anticipated to be additive to MKS’ cash earnings per share in 2002.

Tenta products are designed for 300mm tool applications.

Tenta’s process control subsystems are expected to become part of MKS’ product portfolio for controlling critical process parameters of flow, pressure, composition, energy, and information for the semiconductor, thin-film, and other markets.

Terms of the transaction were not disclosed.


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