Core Systems begins ion implant outsourcing production in Silicon Valley facility

June 13, 2002 – Sunnyvale, CA – Core Systems Inc. has begun production ion implantation of customers’ product wafers in its new, enlarged facility in Sunnyvale.

Core Systems produced its first qualified wafers in May 2002, less than three months after beginning installation of multiple ion implant systems.

The company expects to have more than a dozen implanters qualified for production by September, offering a range of capabilities for applications like semiconductors, Opto-MEMs, and SOI wafers.

Core systems’ new facility has been completely refurbished, from flooring to exhaust system, to meet implant technology and city compliance requirements for Class 10 fab cleanroom operation. A new fiber-optic communications system was also installed to enable rapid information management, including real-time work in process tracking and recipe interlocking for error-free processing.

The range of implanters supports semiconductor applications, with energy ranges from less than 5 keV to 400keV, as well as many other species, such as hydrogen for SOI applications, the company said.


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