June 25, 2002 – Fremont, CA – Mattson Technology Inc. and Dainippon Screen Manufacturing Co. Ltd. (DNS) have amicably resolved their legal disputes with a comprehensive, global settlement which includes termination of all outstanding litigation between the companies and cross licenses of patents related to certain aspects of wet immersion processing systems.

The settlement agreement calls for DNS to pay $40 million to Mattson for past damages, including partial reimbursement of legal fees, related to sales of certain wet processing products in the US.

The legal dispute was over patent infringement claims made against DNS by CFM Technologies, which was acquired by Mattson in January 2001. With this agreement, both parties have settled all past and present claims against one another and agreed to refrain from any further legal action against each other in regards to these patents and their related technologies.

Mattson is also releasing all DNS customers from any claims of infringement relating to their purchase and future use of DNS wet processing equipment.

According to the agreement, DNS and Mattson will cross license certain technologies pertaining to automated batch immersion wet processing systems. The parties have agreed to pay royalties to each other based upon future sales of products utilizing the cross-licensed technologies.