June 27, 2002 — Arizona materials maker Rodel Inc. said it will work with Nanophase Technologies Corp. to make and sell nanoparticle-based coatings for the semiconductor industry.
Rodel said it will combine its chemistries with Nanophase’s metal oxides to create chemical mechanical polishing slurries. A Nanophase official said its NanoTek oxides, with narrow particle size distribution and long-term stability, are specifically engineered for such applications, according to a news release.