June 10, 2002 – Villach, Austria – Wet wafer surface preparation supplier, the SEZ Group, has acquired US-based private company, L-Tech Corp., a manufacturer of drying equipment for batch wafer processing.

The acquisition complements the wet bench product set acquired by SEZ last year, and is a strategic move to complete its portfolio of wet wafer surface preparation products for all 200- and 300mm wafer applications.

With the addition of L-Tech’s drying technology, engineering know-how, and IP, SEZ no longer must rely on outsourcing this technology from third-party vendors.

“L-Tech will provide SEZ with a drying technology critical to batch wafer processing,” commented corporate board spokesperson and Chief Marketing Officer Kurt Lackenbucher. “Ownership of this technology versus licensing it from competitors improves SEZ’s competitiveness and price structure.”

L-Tech’s tools are used for post wet cleaning to dry the wafer using IPA (isopropyl alcohol).