Tegal sells system to Taiwanese MEMS maker

June 6, 2002 — Tegal Corp. said it has sold one of its plasma etch systems to an undisclosed Taiwanese MEMS maker.

The 903e plasma etch system, which can be used to produce structures in silicon and other materials during MEMS fabrication, was sold to a firm that is developing MEMS for consumer devices. Tegal expects to install the system next month, according to a company news release.

Tegal, based in Petaluma, Calif., designs plasma etch systems for optical telecommunications devices, integrated circuits and other microelectronics devices.


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