Brooks-PRI Automation acquires HERMOS Informatik GmbH

July 8, 2002 – Chelmsford, MA – Brooks-PRI Automation Inc. has completed the acquisition of HERMOS Informatik
GmbH based in Mistelgau, Germany, from its parent, the HERMOS Group.

The purchase method of accounting will be used to account for the transaction which is valued at $41 million, based on $37 million in shares of stock and $4 million in cash.

“The acquisition of HERMOS Informatik now enables Brooks-PRI to directly offer RF identification systems for
tracking material in a semiconductor fab,” said Robert Therrien, president and CEO of Brooks-PRI Automation.
“We believe that this strategic acquisition will be a relatively seamless integration and it will have a
modestly positive impact on our fiscal 4Q results.”

“HERMOS Informatik believes that there are tremendous benefits in teaming with Brooks-PRI, a current customer
of HERMOS,” said Harald Buchmann, managing director of HERMOS Informatik. “We have stayed focused on achieving

strong gross margins and operating income throughout this industry down cycle, and will strive to continue making positive contributions to Brooks-PRI.”

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