FANUC unveils cleanroom robot

July 8–ROCHESTER HILLS, Michigan–FANUC Robotics has introduced the M-6iB Cleanroom robot, the latest in a line of controlled environment products the company has offered since 1984.

The M-6iB Cleanroom robot has six degrees of freedom, and a cleanliness rating of ISO Class 5 or better. According to the company, it is an ideal material handling solution for a wide range of industries including pharmaceuticals, semiconductors, hard disks, flat panel displays, clean injection molding, and others where particle emissions and grease leakage must be tightly regulated.

The M-6iB can be used in applications such as part handling, machine load/unload, part and case packing, palletizing, dispensing and assembly. It features motion control for gentle part handling, high throughput with +- 0.08 mm repeatability, and can carry a full front opening unified pod (FOUP) of (25), 300 mm wafers.

“Because of the high construction costs and operating expenses associated with cleanrooms, robot compactness takes on an even greater significance,” says Joe Portelli, FANUC Robotics’ electronics industry manager. “New motor technology allows the M-6iB to be much more compact than its predecessor.”


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