Integration provides sensor measurement, tool data management

July 16–FORT COLLINS, CO–Advanced Energy Industries, Inc., a provider of components and sub-systems solutions for semiconductor, data storage and flat panel display processes, has integrated its Symphony EPM (equipment productivity manager) system with Pacific Scientific Instruments’ (PSI) HYT PM-450, a sensor bus controller that is often used with its HYT vacuum particle sensors.

The integration of PSI’s in-situ HYT sensors was facilitated by both the open architecture of the Symphony technology and by the use of HYT industry-standard PM-450 Ethernet connectivity.

“Our successful integration of the HYT sensor bolsters our strong belief that open architecture and industry standards for connectivity are key to building value-added e-Diagnostics and process control technology for our customers,” says Doug Schatz, Advanced Energy’s chairman and chief executive officer.

To-date, AE has integrated three, unique sensors into the Symphony EPM: the HYT vacuum particle sensor, a Peak Sensor Systems optical emission spectrometer (OES), and AE’s Z-Scan(R) RF sensor.

“Because our Symphony products can easily accommodate sensors from any source, we can provide critical sensor and tool data management for real-time process control and e-Diagnostics,” says Joe Monkowski, Advanced Energy’s senior vice president. “The inherent time resolution of in-situ sensors combined with tool context information provides critical insight into the process, thereby reducing our customers’ time-to-yield, and enabling them to meet their customers’ increasing time-to-market demands.”


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