Aug. 8, 2002 — Researchers from IBM and Nion Co. reported they have extended the power of an electron microscope, allowing scientists to clearly see atomic-scale details in thin slices of materials.

The scientists, whose findings appear in the Aug. 8 issue of the journal Nature, said they combined seven new sets of magnetic lenses with modern computers to fix imperfections that long have caused blurred images. Now, the microscope can make an electron beam that is .075 nanometers, or smaller than a single hydrogen atom, according to an IBM news release.

With ever-shrinking chip features, the breakthrough could aid scientists’ need to see details of materials used in manufacturing semiconductors — and find ways to fix atomic-scale defects. The findings also could lead to better understanding of how to control environmental conditions so parts of the chip could self-assemble, IBM said.