Praxair commissions silane transfill facility in Taiwan

AUG. 19- DANBURY, CT– Praxair Chemax Semiconductor Materials Co., Ltd., Praxair’s joint venture with China Petrochemical Development Co. (Taiwan), has commissioned the first silane (SiH4) transfill facility in Taiwan.

The facility was commissioned in May 2002 and has been operational since June 1st. This fully automated facility will house an industry leading analytical lab and will transfill high grade SiH4 for Praxair Chemax’s customers in Taiwan and all over Asia.

TFT-LCD (Thin Film Transistor- Liquid Crystal Display) manufacturers use silane throughout the array process. In addition, silane is used in the chemical vapor deposition (CVD) of silicon dioxide, silicon nitride insulating layer or amorphous semiconductor layer.

The transfill systems will provide Praxair’s customers in Taiwan with a solid source of high-purity 6.0 grade silane. By providing local transfilling support to semiconductor and TFT-LCD manufacturers in Taiwan, Praxair Chemax can ensure a more reliable and cost-effective means of distribution.

“Praxair is pleased to offer a local supply of silane to our customers in Taiwan,” says Frank Crespo, vice president of semiconductor gases and services for Praxair Electronics. “We will continue to expand our facilities in Asia to better serve the Asian semiconductor manufacturing industry.”

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.