Ultratech Unveils First Line of Nanotechnology Lithography Steppers

SAN JOSE, Calif., SEMICON West 2002, July 16 /PRNewswire-FirstCall/ —
Ultratech Stepper, Inc. (Nasdaq: UTEK), a leading supplier of photolithography systems used to manufacture semiconductors and nanotechnology devices, today launched a new line of steppers specifically targeted toward the core process requirements being driven by the transition to nanotechnology. Ultratech’s new NanoTech(TM) stepper family comprises five products, each based on one of Ultratech’s existing lithography systems, with features designed to address key challenges associated with handling and processing materials used in a variety of nanotechnology applications. Beta testing of the NanoTech family is scheduled to begin in the Q4 2002 timeframe, with production versions available by January 2003.

SEMICON WEST, SAN FRANCISCO, July 23 /PRNewswire-FirstCall/ — Ultratech Stepper, Inc. (Nasdaq: UTEK), a leading supplier of photolithography systems used to manufacture semiconductors and nanotechnology devices, today announced that its chairman and CEO, Arthur W. Zafiropoulo, has been elected by the membership of Semiconductor Equipment and Materials International (SEMI) as chairman of the industry association’s board of directors for 2002.

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