Sept. 12, 2002 – Danbury, CT – ATMI Inc., a provider of specialty materials and services to the semiconductor industry, and Metara Inc., a supplier of automated metrology systems, have signed a joint development and manufacturing agreement.

Under this agreement, ATMI has acquired rights to integrate into its new chemical management system an OEM version of the Metara system for analyzing chemical constituents of liquids used in copper electrochemical deposition. ATMI has concurrently taken a minority equity position in Metara.

C. Patrick Franklin, president and CEO of Metara, said, “We are excited by the confidence that ATMI has placed in Metara technology and products. Under our joint development program, we will be working closely with ATMI. We see Metara technology as a key component in enhancing the ATMI copper process efficiency products.”