Sept. 5, 2002 – Tokyo, Japan – Tokyo Electron Ltd. (TEL), Ebara Corp., and Dainippon Screen Mfg. Co. Ltd. have entered into a memorandum of agreement to found a joint venture company, to develop, manufacture, and market a low energy e-beam direct writing system.
The joint venture company, tentatively named E-Beam Corp., will also develop related enabling technologies, as well as conduct process verifications, with the aim of going into a full-scale shipment of a system capable of a 65nm resolution by 2005.
E-Beam will be located in Tokyo. Its initial capitalization will be 450 million yen with TEL investing 40%, Ebara 40%, and Dainippon Screen 20%.
E-Beam’s president will be Hiroshi Furukawa, who is currently at Ebara. VP and CFO will be Akira Miura from TEL.