Innovators of manufacturing technology receive SEMI award for N. America

Oct. 4, 2002 – Santa Clara, CA – Semiconductor Equipment and Materials International (SEMI) honored eight technologists for their significant contributions to the advancement of semiconductor manufacturing technology.

This year’s recipients were Richard Spanier; the team of Roger Sturgeon, Tom Hedges, Tom Schaefer, Carl Smith, and Mark Zimmer; and the team of W. Karl Olander and Glenn Tom.

“We honor the SEMI Award recipients for their innovation and dedication to the creation of technologies that have significantly advanced our industry,” said Myers. “While the market for semiconductor manufacturing technology may go up and down, technology development presses on, thanks to the creative capacities exhibited by innovators such as those being recognized tonight.”

Richard Spanier, chairman emeritus of Rudolph Technologies Inc., received the SEMI Lifetime Achievement Award for his continuous and significant contributions to technological advancement in the semiconductor manufacturing industry. Spanier served as chairman and president of Rudolph Technologies for 30 years, starting in 1966. He relinquished the president’s role in 1996 and continued as chairman until 2000, when he was elected chairman emeritus.

Recipients of the Lifetime Achievement Award need to have demonstrated over the period of their professional career a sustained commitment to developing technologies that have provided significant value to the progress of the semiconductor equipment and materials industry.

Additionally, five individuals led by Roger Sturgeon received the SEMI Award for their contribution to the development of the Graphic Data Station (GDS) data interchange language that converts IC design data into machine-readable format for manufacturing. GDS/GDSII was developed at Calma Co., Sunnyvale, Calif., in the early 1970s. For the past three decades, this data interchange software has acted as the essential bridge between the design phase of IC development and the world of semiconductor manufacturing. GDSII data is converted into a machine-readable language called CATS (for Computer Aided Transcription Software) – also developed by Sturgeon – which transcribes the data so that it can be read by the photomask systems used in the manufacture of semiconductors.

Two scientists at ATMI Inc., Glenn Tom and W. Karl Olander, were recognized for the contribution to the Safe Delivery Source (SDS) gas storage and delivery system for ion implantation. In order to eliminate the dangers of using hazardous gases stored and delivered under high pressure, Tom and Olander developed a sub-atmospheric gas delivery system. Using a patented adsorbent technology, gases are stored below atmospheric pressure, removing the concerns of catastrophic releases of high-pressure hazardous gases.

The SEMI Award for North America, which has been presented annually since 1979, honors individuals who have made significant technical contributions to the semiconductor industry. Nominations are accepted from individuals of North American-based member companies of the global semiconductor equipment and materials industry association.


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