KLA-Tencor settles with Sensys

Oct. 15, 2002 – San Jose, CA – KLA-Tencor today announced that it has settled a patent infringement suit, which it filed against Sensys Instruments Corp., now a subsidiary of Therma-Wave, Inc. The suit was filed in December 2001, and alleged that certain products sold by Sensys infringed US Patent No. 5,747,813, owned by KLA-Tencor.

In the settlement, Therma-Wave and Sensys agreed that until US Patent No. 5,747,813 expires, they will not sell products having a design similar to that which was accused of infringing the patent. KLA-Tencor has agreed not to sue Sensys or Therma-Wave for allegations of infringement of certain claims of US Patent No. 5,747,813 by Therma-Wave or Sensys products, which conform to the specifications of a redesigned system specified in the settlement agreement.


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