Oct. 22, 2002 — QinetiQ has launched a new program for MEMS prototyping, according to Semiconductor Business News.
The program, called Integram, was launched with $1.27 million of European Commission funding. The deep reactive ion etching service allows companies and universities to supply their own designs, mask plates or prepatterned wafers. Additional services include design and prototyping kits for various micromachining processes, the report said.
QinetiQ is a spinout of Britain’s Defence Evaluation Research Agency.