TEL to participate in Albany NanoTech Initiative

Nov. 21, 2002 – Albany, NY – Tokyo Electron (TEL), announced its participation in Albany NanoTech’s new 300mm semiconductor research center at a press conference held on the campus of the U. at Albany-State University of New York (UAlbany).

TEL, a supplier of semiconductor manufacturing equipment, has agreed to participate in the new center through a joint TEL-Albany NanoTech program, which is expected to generate more than $300 million in spending over seven years and support more than 300 research jobs.

The new NanoTech center will allow advanced semiconductor material and process research to be performed on 300mm equipment rather than laboratory scale systems, which will shorten the time from R&D to production. The center will be housed in two 300mm wafer cleanroom buildings. The first of these buildings is nearing completion and will begin operations in late 2003. Once both buildings are completed, they will house a fully integrated semiconductor fabrication line capable of developing materials and processes for advanced semiconductor devices at the 45nm generation and beyond.

TEL’s participation in the Albany NanoTech project will provide it with opportunities to collaborate with industry companies, as well as researchers from NanoTech.

The exact details of TEL’s participation in the Albany Initiative have not been finalized, but will include the installation of TEL tools at the facility, placement of TEL researchers and engineers, and joint leadership on a variety of advanced research projects.


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