Numerical Technologies licenses phase-shift technology to Samsung

Dec. 17, 2002 – San Jose, CA – Numerical Technologies Inc., the provider of subwavelength lithography-enabling technology to the semiconductor industry, today announced that Samsung Electronics Co. Ltd. has signed an agreement to license Numerical’s phase-shifting technology for the production of its newest and most advanced SRAM product.

The agreement comes after a lengthy and successful research and development engagement during which teams from both companies worked closely to refine the 120nm manufacturing process for this product. Production of the device, which will power Samsung’s latest electronics products, is expected to commence in early 2003.

Already deployed in fabs and foundries around the globe, Numerical’s phase-shifting technology enables chipmakers to fabricate subwavelength ICs using available optical lithography equipment. Numerical’s phase-shifting technology is the only commercially available strong phase-shifting technology that is currently used in IC production. It has been employed to fabricate transistors as small as 9nm in a research environment.


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