Daw launches wall, floor and ceiling systems for 300 mm fabs

JAN. 23–SALT LAKE CITY, Utah–Daw Technologies, Inc. an designer and installer of controlled environment components, has launched its new wall, floor and ceiling systems designed for 300–mm semiconductor cleanrooms.

The company has recently finished work on its first 300–mm upgrade using the company’s new line of 300 mm products. The new system includes the Network 306 wall, the Matrix 407 floor, and the AirFrame 509 ceiling systems.

“We saw a great need to develop a new set of products specifically for 300-mm fabs,” said Pete Spransy, vice president of research and development, Daw Technologies.

“Tools used for 300–mm wafer processing are becoming much taller and heavier, requiring more structural ceiling and floor systems in addition to higher walls. We have designed a unique product set for both new 300–mm fabs as well as an upgrade system for existing 200–mm fabs,” he adds.

The upgrade, Spransy says, was recently employed by one of Daw’s customers to upgrade a six-year-old 200-mm fab to a 300–mm facility, saving the company millions and allowing quick ramp time.

The NetWork 306 wall system is a batten-less aluminum honeycomb wall system with an internal splice that divides the wall into upper and lower panels. The upper panel hangs from the headtrack allowing the lower panel to be removed for tool move-in. The time savings derived from this feature combined with a batten-less type wall are significant. To date, the company has provided walls up to 18′-0″ (5.5 m) high but the system allows for even higher applications.

The Matrix 407 raised-access floor panel is rated for 3,000 lb (1,360 kg). Its most unique feature is that it is made from extruded aluminum. The failure mode of die-cast aluminum material is catastrophic where as extruded aluminum bends but does not break. This floor can be used in specific move-in paths or simply over the entire floor area to provide maximum flexibility and safety when moving in very heavy multimillion-dollar process equipment.

The AirFrame 509 ceiling is designed specifically for attaching AMHS. It has a continuous slot in the bottom of the grid compatible with Bosch 1/4-turn nuts. The patented cam-lock connection for the intersections dramatically simplifies installation, reducing install time by nearly a third. The company has also patented a stiffener that can easily be attached to the top of the grid wherever AMHS hangers occur.


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