Nano-Or launches tabletop tool for MEMS imaging

Jan. 8, 2003 — Inspecting MEMS devices is among the applications eyed for a new three-dimensional imaging and measurement instrument.

Israel-based Nano-Or Technologies Ltd. said its 3Dscope2000 is the first tabletop instrument to provide instant, wide-area 3-D images and measurements with nanometer vertical and micron-range horizontal resolution. The instrument offers improved accuracy and increased defect detection capabilities available from current technologies, the company said in a news release.

The system, operated via desktop computer, includes an optical sensing unit and electronics control box. It is expected to be available in the second quarter for between $100,000 and $150,000, the release said.

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