NanoVia launches cutting tool for MEMS

Jan. 10, 2003 — NanoVia LP of Londonderry, N.H., said it has developed a diffractive optic dicing tool for cutting holes and slots in micro tubing for MEMS devices.

The MicroMultiDice uses a patented beam shaping and imaging system that allows for precision slots to be made using low-power lasers. Applications include slots for precision drug delivery or sleeves for coil windings in micromagnetic sensor devices, according to a company news release.

NanoVia said it offers the system with specialized tooling and fixtures designed for clients’ specifications.

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