Feb. 21, 2003 — Akrion, an Allentown, Pa.-based maker of equipment for cleaning MEMS and other semiconductor-related devices, has booked two orders during the first quarter, according to a news release.
The firm said it sold its GAMA automated wet station to a new customer in Europe specializing in wafer reclamation services. It also received orders for its V3 semi-automated wet station for a customer in Singapore. The GAMA is designed to support processing of devices of 0.13 micron and below; the V3 is for feature sizes above .25 micron.