Honeywell buys Unaxis’ MEMS etching system

Feb. 18, 2003 — Honeywell International Inc. bought plasma etching equipment for advanced MEMS manufacturing from Unaxis Semiconductors, according to a news release.

Honeywell installed Unaxis’ Versalock cluster system in its Redmond, Wash., facility. Honeywell said the system will enhance its capacity to produce a variety of low-cost MEMS components, the release said.

Unaxis, based in St. Petersburg, Fla., is a division of Unaxis Balzers Ltd., a Swiss developer of integrated manufacturing systems and services the semiconductor, data storage, flat panel display, optical component and other markets.

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