Ultratech picks TMC’s vibration control system

FEB.10–PEABODY, Mass.–Ultratech Stepper, Inc. has chosen Technical Manufacturing Corp.’s Electro-Damp II Active Vibration Control System as the new platform for its 200- and 300- mm Saturn Spectrum and Titan Wafer Stepper family.

“We are extremely pleased to be partnered with Ultratech for their vibration control and stage feedforward cancellation requirements,” says Ulf Heide, TMC’s president.

Ultratech plans to incorporate Electro-Damp II into its steppers for semiconductor, advanced packaging, microlithography, nanotechnology, and optical networking applications.

Each system will include TMC’s DC-2000 digital controller, non-contacting electronic valving system, Gimbal Piston isolator, and high force linear motors. The isolation system will be incorporated into a frame, also made by TMC, which will be the foundation of the tool.


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