Cymer opens chamber refurbishment facility

MARCH 7–SAN DIEGO, Calif.–Cymer, Inc., a supplier of excimer light sources used in semiconductor manufacturing, has opened a chamber refurbishment facility in South Korea’s Eoyeon-Hansan Industrial Park.

The 25,000-square-foot facility will serve as Cymer’s first international chamber refurbishment hub for the company’s full line of advanced deep-ultraviolet (DUV) light sources, further enabling Cymer to respond to its customers’ needs quickly and effectively.

Located in close proximity to key chipmakers, the Korean facility features an ISO Class 7 cleanroom. The facility has already commenced production, shipping the first chamber to a Korea-based manufacturer of dynamic random-access memory (DRAM) devices. The company expects to continue to expand this geographic reach over the next two quarters to serve customers throughout Asia and the world.

The new facility builds on Cymer’s established sales, service, support and manufacturing capabilities to expand the company’s highly efficient manufacturing infrastructure, according to Pascal Didier, Cymer’s president and chief operating officer. Didier noted,

“As the industry enters into the ‘Golden Age of DUV’ lithography, it’s imperative that Cymer is readily able to support worldwide demand for DUV light sources,” says Pascal Didier, Cymer’s president and chief operating officer.


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.