German MEMS maker buys Electroglas system

April 1, 2003 — A German MEMS device maker bought an automated wafer inspection system from San Jose, Calif.-based Electroglas Inc., according to a news release. The purchase price was not disclosed.


HL Planartechnik GmbH said the QuickSilver IIe, which identifies, measures and classifies defects on processed wafers, will help it ramp up production. The Dortmund, Germany-based firm makes MEMS devices for infrared, mass flow and temperature sensing in automotive, medical, consumer and industrial applications.


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