Particle Measuring Systems unveils BTA, slurry monitors

APRIL 2–BOULDER–Colo–Particle Measuring Systems says its SlurryAlert provides continuous online measurements of undiluted slurry used in Copper CMP.

It rapidly detects changes in particle size distribution and number of large diameter particles as well as shifts in percent solids.

SlurryAlert BTA Monitor provides continuous 1-minute measurements of BTA in the chemical delivery system. These systems are extremely stable and very low maintenance requiring almost no operator involvement.

Monitoring of undiluted Alumina, cerium and silica slurry eliminates waste streams and troublesome valves. Real-time monitoring allows users to increase yield by preventing wafer scratching.


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