Entegris adds advanced wafer analyzers

JUNE 4–CHASKA, Minn.–Entegris, Inc., a materials integrity management company, has added advanced critical materials testing capability with a wafer analyzer that enhances its current capabilities to characterize surface organics on 300 mm silicon wafers.

Entegris’ surface wafer analyzer, the SWA256M by GL Sciences, employs state-of-the-art thermal desorption technology that provides complete extraction of organic compounds from the surface of 300 mm (and below) silicon wafers for subsequent analysis via gas chromatography/mass spectrometry (GC/MS).

The two techniques combined allow individual organic compounds to be detected below a billionth of a gram per square centimeter of a silicon wafer’s surface. These surface characterization techniques are used by Entegris to identify organic contamination issues which otherwise may not be apparent to Entegris’ customers until many costly steps later in the semiconductor manufacturing process.

The new surface wafer analyzer is part of the company’s Materials Technology Laboratory (MTL), where Entegris has developed its polymer materials characterization and applications.

In addition to the laboratory, this expertise is due to the company’s presence in nearly every semiconductor fab in the world – allowing Entegris to become a leader in the selection and development of chemically pure materials for use in contamination sensitive industries.


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