EV Group launches wafer-edge inspection system

June 9, 2003 – EV Group, an Austrian maker of MEMS and semiconductor wafer processing equipment, has launched a new system for wafer-edge defect inspection, according to a news release.

The SmartEdge automatically detects defects such as scratches, chips, cracks, as well as crystal growth with a robotic handling system. It eliminates the need for manual wafer-edge inspection, the release said.


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