June 11, 2003 — Integrated Sensing Systems Inc. (ISSYS) has launched a new business for its nanomaterial designed to boost the performance of MEMS and other devices.

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The Ypsilanti, Mich.-based MEMS developer said NanoGetters, a wholly owned subsidiary, sells the eponymous technology — thin films of chemically reactive materials that pull air or water vapor out of the cavity or package. For MEMS in particular, NanoGetters offers a service for capping wafers with the new material, allowing integration into MEMS vacuum package processes at the full wafer or individual chip level.

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The product was developed by ISSYS for its MEMS devices, but the company saw the potential in other applications, such as gas purification, semiconductor devices or solid-state vacuum pumps.

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“It’s a performance issue and enhancement to a technique of vacuum packaging,” said Doug Sparks, ISSYS’s executive vice president of operations. “We’ve been using it for over a year on our MEMS devices and gotten good results over time.”