Mykrolis, Nor-Cal form strategic alliance

JUNE 5–BILLERICA, Mass.–Mykrolis Corp. and Nor-Cal Products Inc. have entered into a limited strategic cross distribution alliance to provide complementary chamber critical measurement and control technology to the global semiconductor equipment industry.

Officials say the Mykrolis XacTorrTM Capacitance Diaphragm Gauge and Nor-Cal IntellisysTM downstream pressure control valves and controllers will present a unique alternative for demanding pressure measurement and process control – a critical parameter in thin film processes.

These Digital Signal Processor (DSP) based products enable front-end semiconductor equipment OEMs and end users to increase wafer throughput with improved uniformity, yield and cost of ownership.


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