Omron to offer MEMS flow sensor

June 27, 2003 — Omron Corp. will begin selling a MEMS-based gas flow sensor for medical, industrial and consumer applications, according to a news release.

The Japan-based automation company said the D6F MEMS sensor uses MEMS and fluidic technology to measure the airflow rate of appliances, ventilators, semiconductor equipment and medical devices. Omron said the sensor offers lower cost and size and a higher degree of accuracy than conventional flow meters.


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