JUNE 27–FREMONT, Calif.–Addressing the semiconductor industry challenges relating to increasingly complex diagnostic data acquisition, Asyst Technologies, Inc. has introduced the industry’s first family of software products focused on the implementation of the next generation of Semiconductor Equipment and Materials International (SEMI) EDA standards.

With this new suite of products Asyst is providing both adaptive and integrated solutions that meet the equipment connectivity changes now endorsed by a new series of object-based SEMI standards that provide “data on demand” in support of advanced manufacturing applications.

“The need for a next generation of equipment connectivity solutions is clear,” said Paula LuPriore, vice president/general manager, Connectivity Solutions at Asyst. “Existing standards such as SECS/GEM, while still required, need to be coupled with new technologies and solutions that meet the challenges of increasing wafer size and decreasing geometries.”

Manufacturing rules, she says, have changed with 300 mm wafer fabrication as isolation technology and automation are no longer optional.

“More complex automation systems require more advanced software solutions to maximize fab productivity and optimize tool utilization,” she adds.

Addressing these requirements, GWEIB and GWconX300+ are the first in a family of new Asyst software products that have been built upon the emerging SEMI standards coming from the SEMI Diagnostic Data Acquisition (DDA), Object Based Equipment Model (OBEM), Equipment Performance Tracking (EPT) and XML Task Forces, to name a few. Using the recently approved SEMI PR8 Equipment Data Acquisition Solution as the architectural framework, these new products provide the needs of the semiconductor industry that are being driven by new standards such as SEMI E120 Common Equipment Model (CEM), SEMI E116 Equipment Performance Tracking (EPT) and SEMI E125 Equipment Self Description.