SUSS launches lithography package

June 20, 2003 — SUSS MicroTec, a Munich, Germany, supplier of production and process technology for the small tech and semiconductor industries, has launched a new package of lithography tools, according to a news release.

The package of four technologies, known as SupraYield, boosts throughput and resolution, and reduces lithography costs compared with current stepper technology. The package is designed for production of MEMS, light-emitting diodes and optoelectronics, the release said.


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