SUSS Microtec unveils litho products

June 23, 2003 – SUSS Microtec, a supplier of production, process, and test technologies, has introduced a new line of lithography technologies for use in wafer-level packaging, MEMS, and optoelectronics.

Collectively called SupraYield, the set includes mask pellicle technology, a mask aligner, advanded photoresists and large clearfield mask movement.

SupraYield is designed to expose the entire wafer in one step, increasing throughput and reducing costs for lithography systems.


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