Adept, MSP link wafer handling technologies

July 9, 2003 – Adept Technology, Livermore, CA, and MSP Corp., Minneapolis, MN, are combining technologies to create an improved wafer cleaning system. Under the deal, MSP will use Adept Technology’s FFE wafer handling platform in its MSP 2300XP2 particle deposition tool. The coupling will give MSP customers “a solution that will improve their wafer cleaning system performance,” said MSP president Benjamin Liu.


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